Intrinsic stress in A1N prepared by dual-ion-beam...

Intrinsic stress in A1N prepared by dual-ion-beam sputtering

H. Windischmann
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Volume:
154
Year:
1987
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(87)90361-0
File:
PDF, 830 KB
english, 1987
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