A statistical study of the combined effects of substrate...

Thin Solid Films 1987 Vol. 154; Iss. 1-2

A statistical study of the combined effects of substrate temperature, bias, annealing and a Cr3Si2 undercoating on the tribological properties of r.f. sputtered MoS2 coatings

J.K.G. Panitz, L.E. Pope, C.R. Hills, J.E. Lyons, D.J. Staley
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Volume:
154
Year:
1987
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(87)90376-2
File:
PDF, 645 KB
english, 1987
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