The effect of nitrogen content on the critical normal force...

Thin Solid Films 1987 Vol. 154; Iss. 1-2

The effect of nitrogen content on the critical normal force in scratch testing of TiN films

J. Valli, J.M. Molarius, A.S. Korhonen
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Volume:
154
Year:
1987
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(87)90378-6
File:
PDF, 1.08 MB
english, 1987
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