TiN coatings on M2 steel produced by plasma-assisted...

Thin Solid Films 1987 Vol. 154; Iss. 1-2

TiN coatings on M2 steel produced by plasma-assisted chemical vapor deposition

M.R. Hilton, G.J. Vandentop, M. Salmeron, G.A. Somorjai
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Volume:
154
Year:
1987
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(87)90380-4
File:
PDF, 685 KB
english, 1987
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