The deposition mechanisms and microstructures of tungsten films produced by silicon reduction of WF6
Heung Lak Park, Chong Do Park, J.S. ChunVolume:
166
Year:
1988
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(88)90364-1
File:
PDF, 419 KB
english, 1988