Volume 166; Issue none

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Thin Solid Films
Volume 166; Issue none

Thin Solid Films

Volume 166; Issue none

1

Editorial Board

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 41 KB

english, 1988

2

Preface

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 368 KB

english, 1988

3

Reaction kinetics in tungsten/barrier metal/silicon systems

K. Suguro, Y. Nakasaki, T. Inoue, S. Shima, M. Kashiwagi

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 815 KB

english, 1988

4

Reactively sputtered indium oxide diffusion barrier

E. Kolawa, C.W. Nieh, J.M. Molarius, L. Tran, C. Garland, W. Flick, M.-A. Nicolet, F.C.T. So, J.C.S. Wei

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 394 KB

english, 1988

5

Al3Ti formation by diffusion of aluminum through titanium

M. Thuillard, L.T. Tran, M.-A. Nicolet

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 371 KB

english, 1988

6

Chemical stability of vanadium boride with aluminum

E. Kolawa, J.M. Molarius, W. Flick, C.W. Nieh, L. Tran, M.-A. Nicolet, F.C.T. So, J.C.S. Wei

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 427 KB

english, 1988

7

The deposition mechanisms and microstructures of tungsten films produced by silicon reduction of WF6

Heung Lak Park, Chong Do Park, J.S. Chun

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 419 KB

english, 1988

8

A comparison of the step coverage of aluminum coatings produced by two sputter magnetron systems and a dual-beam ion system

J.K.G. Panitz, B.L. Draper, R.M. Curlee

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 699 KB

english, 1988

9

Reactive-ion-etch-compatible metallization for partially covered contact applications

James G. Ryan, Neal P. Marmillion, Jonathan P. Fineman, Dennis P. Bouldin

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 435 KB

english, 1988

10

Effect of encapsulation on the reaction between palladium and GaAs thin films

E.T.-S. Pan, A. Venezia, E. Kolawa, J.M. Molarius, M.-A. Nicolet, J.L. Tandon, R. Ruiz

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 361 KB

english, 1988

11

Process technology for packing applications

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 785 KB

english, 1988

12

Coatings for strain compliance in plastic packages: Opportunities and realities

K.R. Kinsman, B. Natarajan, C.A. Gealer

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 871 KB

english, 1988

13

Interface interactions relevant to packaging technology

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 1000 KB

english, 1988

14

The reliability of integrated circuits protected with Ti-W/Au bumps

P.J. Pokela, T.M. Pitkänen, R. Ahlroth

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 372 KB

english, 1988

15

Focused electron and ion beam repair strategies for wafer-scale interconnections in thin film packaging

H.T. Lin, J.F. McDonald, J.C. Corelli, S. Balakrishnan, N. King

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 1.00 MB

english, 1988

16

Characterization of HfBx films deposited by r.f. diode and r.f. magnetron sputtering

W.Y. Lee, G. Olive, F. Sequeda, V. Deline, T. Huang, G. Gorman, D.W. Chung

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 430 KB

english, 1988

17

Ceramic beams and thin film growth

J.I. Brand, D.R. Miller

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 562 KB

english, 1988

18

Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method

L. Hiltunen, M. Leskelä, M. Mäkelä, L. Niinistö, E. Nykänen, P. Soininen

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 288 KB

english, 1988

19

In0.30Al0.70As/In0.30Ga0.70As quasi-insulating gate strained-layer field effect transistors grown by molecular beam epitaxy

P. Chu, C.L. Lin, H.H. Wieder

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 480 KB

english, 1988

20

Thermally sprayed coatings of YBa2Cu3O6+x

P. McGinn, N. Jain, V. Anand, D. Lee

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 448 KB

english, 1988

21

Growth and properties of YBa2Cu3O7−x superconducting thin films

S.I. Shah, C.R. Fincher, M.W. Duch, D.A. Beames, K.M. Unruh, C.P. Swann

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 560 KB

english, 1988

22

Effects of deposition conditions on the superconducting properties of r.f. and d.c. magnetron sputter-deposited YBa2Cu3O7−x films

W.Y. Lee, J. Salem, V. Lee, C.T. Rettner, G. Gorman, R. Savoy, V. Deline, T. Huang, D.W. Chung

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 438 KB

english, 1988

23

Analysis of TiN by charged particle beams: Nuclear reaction analysis, nuclear reaction broadening and Rutherford backscattering

V.H. Rotberg, A.J. Perry, C.C. Strandberg, G. Was

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 501 KB

english, 1988

24

An evaluation of four computer modelling programs for Rutherford backscattering spectrometry analysis of oxidized surfaces

J. Saulitis, G.R. Johnston, J.L. Cocking

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 553 KB

english, 1988

25

Resonant low energy electrons and their impact on non-destructive depth profiling of thin film samples

J.S. Zabinski, B.J. Tatarchuk

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 605 KB

english, 1988

26

Chemical characterization of the deactivation and protection of FeTi thin films using complementary non-destructive techniques

J.H. Sanders, B.J. Tatarchuk

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 522 KB

english, 1988

27

Structural changes induced by heating in electroless nickel-phosphorus alloys

Q.X. Mai, R.D. Daniels, H.B. Harpalani

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 602 KB

english, 1988

28

Plasma spraying of WO3: Structural characterization of the coatings

M. Ladouceur, J.P. Dodelet, L. Parent, S. Dallaire

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 370 KB

english, 1988

29

Electrical insulating properties of r.f.-sputtered magnesia coatings

P. Vuoristo, J. Wahlroos, T. Mäntylä, P. Kettunen

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 435 KB

english, 1988

30

X-ray microfluorescence analyzer for multilayer metal films

Brian J. Cross, David C. Wherry

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 498 KB

english, 1988

31

A transmission electron microscopy study on the crystallization of amorphous Ni-P electroless deposited coatings

Ma Erming, Luo Shoufu, Li Pengxing

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 744 KB

english, 1988

32

Structure and properties of ion sulphocarbonitrided coatings on several structural steels

Buqian Wang, Xun Luan, Zhenglin Li, Jun Zhang

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 488 KB

english, 1988

33

Mechanical behavior of aluminum and Al-Cu(2%) thin films

F.R. Brotzen, C.T. Rosemayer, R.J. Gale

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 400 KB

english, 1988

34

Microhardness and microstructure of ion-beam-sputtered, nitrogen-doped NiFe films

T.W. Wu, C. Hwang, J. Lo, P. Alexopoulos

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 665 KB

english, 1988

35

Effects of neutral gas incorporation in molybdenum coatings produced by magnetron sputtering

P. Bosland, J. Danroc, R. Gillet, L. Lombard

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 450 KB

english, 1988

36

Variable angle spectroscopic ellipsometry: A non-destructive characterization technique for ultrathin and multilayer materials

John A. Woollam, Paul G. Snyder, Martin C. Rost

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 337 KB

english, 1988

37

Simultaneous determination of dispersion relation and depth profile of thorium fluoride thin film by spectroscopic ellipsometry

S.Y. Kim, K. Vedam

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 498 KB

english, 1988

38

Microscopic bubble formation and collapse at liquid-solid interfaces during electrical powering of thin film structures

S.Matts Goho, T.E. Orlowski

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 657 KB

english, 1988

39

Optical second harmonic generation as a probe of interface composition and structure

J.C. Hamilton, R.J. Anderson

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 169 KB

english, 1988

40

Slow positron annihilation spectroscopy of heterojunctions and homojunctions of GaAs-based semiconductor thin films

R.L. Frost, A.B. Dewald, J.P. Schaffer, A. Rohatgi, B. Nielsen, K.G. Lynn

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 500 KB

english, 1988

41

Preparation and characterization of reactively sputtered silicon nitride thin films

S.K. Ghosh, T.K. Hatwar

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 505 KB

english, 1988

42

The bond structures and properties of chemically vapour deposited amorphous SiC

Young Jin Park, Young Wook Park, John S. Chun

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 359 KB

english, 1988

43

Wear of Co-Ni thin film magnetic recording tape against metallic and ceramic surfaces

D.R. Srinivasan, D.T. Gawne, J.L.S. Wales

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 731 KB

english, 1988

44

Insert-mounted thin film sensors for real-time monitoring of tool conditions

W.P. Robbins, B. Bischoff, S. Ramalingen

Journal:

Thin Solid Films

Year:

1988

Language:

english

File:

PDF, 404 KB

english, 1988

45

Author index

Journal:

Thin Solid Films

Year:

1988

File:

PDF, 50 KB

1988