Characterization of HfBx films deposited by r.f. diode and...

Characterization of HfBx films deposited by r.f. diode and r.f. magnetron sputtering

W.Y. Lee, G. Olive, F. Sequeda, V. Deline, T. Huang, G. Gorman, D.W. Chung
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Volume:
166
Year:
1988
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(88)90373-2
File:
PDF, 430 KB
english, 1988
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