Factorial experimental investigation of plasma-enhanced...

Factorial experimental investigation of plasma-enhanced chemical vapor deposition of silicon nitride thin films

C.-S. Yoo, A.G. Dixon
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Volume:
168
Year:
1989
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(89)90013-8
File:
PDF, 382 KB
english, 1989
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