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Thermal degradation of TiSi2/poly-Si gate electrodes
S. Nygren, M. Östling, C.S. Petersson, H. Norström, K.H. Rydén, R. Buchta, C. ChatfieldVolume:
168
Year:
1989
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(89)90016-3
File:
PDF, 1.59 MB
english, 1989