The direct photochemical vapour deposition of SiO2 from...

Thin Solid Films 1989 Vol. 168; Iss. 2

The direct photochemical vapour deposition of SiO2 from Si2H6 and N2O3 mixtures

Y.K. Bhatnagar, W.I. Milne
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Volume:
168
Year:
1989
Language:
english
Pages:
8
DOI:
10.1016/0040-6090(89)90018-7
File:
PDF, 341 KB
english, 1989
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