Porous structure of SiO2 films synthesized at low...

Thin Solid Films 1989 Vol. 171; Iss. 1

Porous structure of SiO2 films synthesized at low temperature and pressure

M.R. Baklanov, L.L. Vasilyeva, T.A. Gavrilova, F.N. Dultsev, K.P. Mogilnikov, L.A. Nenasheva
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Volume:
171
Year:
1989
Language:
english
Pages:
10
DOI:
10.1016/0040-6090(89)90032-1
File:
PDF, 624 KB
english, 1989
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