Note on the origin of intrinsic stresses in films deposited...

Thin Solid Films 1989 Vol. 171; Iss. 1

Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering

F.M. D'Heurle, J.M.E. Harper
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Volume:
171
Year:
1989
Language:
english
Pages:
12
DOI:
10.1016/0040-6090(89)90035-7
File:
PDF, 804 KB
english, 1989
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