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The effect of target power on the nitrogen partial pressure level and hardness of reactively sputtered titanium nitride coatings
William D. Sproul, Paul J. Rudnik, Carl A. GogolVolume:
171
Year:
1989
Language:
english
Pages:
11
DOI:
10.1016/0040-6090(89)90042-4
File:
PDF, 591 KB
english, 1989