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Characterization of imprinted gratings based on transparent materials by transmission scatterometry
Pietroy, David, Gereige, Issam, Gourgon, CécileVolume:
106
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.052
Date:
June, 2013
File:
PDF, 405 KB
english, 2013