Real time spectroscopic ellipsometry for characterization of nucleation, growth, and optical functions of thin films
R.W. Collins, Ilsin An, H.V. Nguyen, Yiwei LuVolume:
233
Year:
1993
Language:
english
Pages:
9
DOI:
10.1016/0040-6090(93)90100-4
File:
PDF, 825 KB
english, 1993