Study by real time ellipsometry of the growth of amorphous...

Thin Solid Films 1993 Vol. 233; Iss. 1-2

Study by real time ellipsometry of the growth of amorphous and microcrystalline silicon thin films combining glow discharge decomposition and UV light irradiation

N. Layadi, P. Roca i Cabarrocas, V. Yakovlev, B. Drévillon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
233
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(93)90108-2
File:
PDF, 414 KB
english, 1993
Conversion to is in progress
Conversion to is failed