Real-time monitoring and control during MOVPE growth of...

Real-time monitoring and control during MOVPE growth of CdTe using multiwavelength ellipsometry

Blaine Johs, Dave Doerr, Shakil Pittal, I.B. Bhat, S. Dakshinamurthy
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Volume:
233
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90111-2
File:
PDF, 332 KB
english, 1993
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