In situ optical characterization of GaAs and InP surfaces...

Thin Solid Films 1993 Vol. 225; Iss. 1-2

In situ optical characterization of GaAs and InP surfaces during chloride atomic layer epitaxy

Kenichi Nishi, Akira Usui, Hiroyuki Sakaki
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Volume:
225
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(93)90124-8
File:
PDF, 513 KB
english, 1993
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