![](/img/cover-not-exists.png)
The chemisorption and reaction of GeCl4 with Si(100)
D.A. Lapiano-Smith, F.R. McFeelyVolume:
225
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90153-g
File:
PDF, 328 KB
english, 1993