Analytical and chemical techniques in the study of surface species in atomic layer epitaxy
S. Haukka, E.-L. Lakomaa, T. SuntolaVolume:
225
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90170-t
File:
PDF, 334 KB
english, 1993