IR spectroscopic ellipsometry: instrumentation and...

Thin Solid Films 1993 Vol. 234; Iss. 1-2

IR spectroscopic ellipsometry: instrumentation and applications in semiconductors

Gilbert Zalczer, Olivier Thomas, Jean-Philippe Piel, Jean-Louis Stehlé
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Volume:
234
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0040-6090(93)90285-w
File:
PDF, 418 KB
english, 1993
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