Fundamental research on the deposition of cubic boron nitride films on curved substrates by ion-beam-assisted vapor deposition
M. Sueda, T. Kobayashi, H. Tsukamoto, T. Rokkaku, S. Morimoto, Y. Fukaya, N. Yamashita, T. WadaVolume:
228
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0040-6090(93)90572-7
File:
PDF, 632 KB
english, 1993