Volume 228; Issue 1-2

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Thin Solid Films
Volume 228; Issue 1-2

Thin Solid Films

Volume 228; Issue 1-2

1

Editorial Board

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 41 KB

english, 1993

2

Preface

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 91 KB

english, 1993

3

Organization

Journal:

Thin Solid Films

Year:

1993

File:

PDF, 27 KB

1993

4

Reflection electron microscopy study of thin film growth

Katsumichi Yagi, Hiroki Minoda, Masashi Shima

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 6.72 MB

english, 1993

5

Hydrogen cleaning of silicon wafers. Investigation of the wafer surface after plasma treatment

J. Ramm, E. Beck, A. Zueger, A. Dommann, R.E. Pixley

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 279 KB

english, 1993

6

Atomic force microscopy study of titanium dioxide thin films grown by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, Leena-Sisko Johansson, Lauri Niinistö

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 2.76 MB

english, 1993

7

Thin film growth on an O-precovered Ru(0001) surface

K. Kalki, M. Schick, G. Ceballos, K. Wandelt

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 363 KB

english, 1993

8

On the influence of the substrate properties on the internal growth stress of titanium films at 250 °C

H.J. Schneeweiß, R. Abermann

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 371 KB

english, 1993

9

Properties and applications of vacuum-deposited CuCr films

J. Schumann, W. Brückner, A. Heinrich

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.73 MB

english, 1993

10

High rate sputtering of metals and metal oxides with a moving plasma zone

R. Kukla, M. Bähr, S. Beißwenger, W.-E. Fritsche, M. Lübbehusen

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 3.38 MB

english, 1993

11

Auger electron spectroscopy, low energy electron diffraction and electron energy loss spectroscopy studies of Se overlayers grown on Cu(111) surfaces

Seiichi Nagashima, Iwao Ogura

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 403 KB

english, 1993

12

Thin SiO2Si3N4SiO2 films: Auger depth profile evaluation by means of factor analysis

L. Gonzo, F. Marchetti, M. Sarkar

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 299 KB

english, 1993

13

X-ray photoelectron spectroscopy and X-ray-excited Auger electron spectroscopy studies of the initial deposition of hydrogenated amorphous carbon

I. Montero, L. Galán, A. Laurent, J. Perrière, J. Spousta

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 349 KB

english, 1993

14

Relation between the dislocations in chemically vapour-deposited diamond and the linewidth of the Raman spectrum

Masahiko Mitsuhashi, Shiro Karasawa, Seishiro Ohya, Fumitaka Togashi

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.76 MB

english, 1993

15

Characterization of a sputtered amorphous WCCo coating annealed in air

A. Cavaleiro, M.T. Vieira

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 6.56 MB

english, 1993

16

Interface of a titanium film ion plated on stainless steel

H. Kibe, K. Yamada, M. Nagoshi, H. Noro, K. Sato, H. Kagechika

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 5.55 MB

english, 1993

17

Fundamental research on the deposition of cubic boron nitride films on curved substrates by ion-beam-assisted vapor deposition

M. Sueda, T. Kobayashi, H. Tsukamoto, T. Rokkaku, S. Morimoto, Y. Fukaya, N. Yamashita, T. Wada

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 632 KB

english, 1993

18

Optical properties of Zr films grown under ion bombardment

J.F. Trigo, E. Elizalde, J.M. Sanz

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.38 MB

english, 1993

19

Structures of Au and Ti thin films formed at the interface with Si by the plasma process

Kunihiro Kashiwagi, Hideki Sekiguchi, Yoichi Murayama

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 351 KB

english, 1993

20

Effect of hydrogen dilution on the growth of hydrogenated amorphous silicon studied by in-situ phase-modulated ellipsometry

A. Canillas, J. Campmany, J.L. Andújar, E. Bertran

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 351 KB

english, 1993

21

Structure-dependent surface conductance at the initial stages in metal epitaxy on Si(111) surfaces

Shuji Hasegawa, Shozo Ino

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 522 KB

english, 1993

22

In and ex situ diagnostics of the growth of α-Ti thin films deposited by plasma-enhanced physical vapour deposition

H. Steffen, H. Wulff, A. Lunk

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 513 KB

english, 1993

23

The oxidation kinetics of thin copper films studied by ellipsometry

M. Rauh, P. Wiβmann

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 301 KB

english, 1993

24

Chemical vapour deposition tungsten film growth studied by in situ growth stress measurements

G.J. Leusink, T.G.M. Oosterlaken, G.C.A.M. Janssen, S. Redelaar

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 349 KB

english, 1993

25

Oxidation of silicon in r.f. plasma measured by rapid in situ during process ellipsometry

H. Shinno, M. Kitajima

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 306 KB

english, 1993

26

In situ real-time ellipsometric study of the growth of r.f. plasma deposited amorphous hydrogenated silicon oxynitride thin films

J. Campmany, A. Canillas, J.L. Andújar, J. Costa, E. Bertran

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 488 KB

english, 1993

27

Excimer (XeCl) laser processing of W/Si bilayers and multilayers up to the Si melting threshold

E. D' Anna, M.L. De Giorgi, S. Luby, A. Luches, E. Majkova, M. Martino

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 357 KB

english, 1993

28

Interfacial reaction of MgO/TiOx superlattice thin films

F. Imai, K. Kunimori, T. Uchijima, H. Nozoye

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 314 KB

english, 1993

29

A study of thin Al films on Sn

R.A. Douglas, A.C. Peterlevitz, R. Landers

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 185 KB

english, 1993

30

Persistent photoconductivity in undoped a-Si:H/a-SiC:H multilayers

J. Bertomeu, J. Puigdollers, J.M. Asensi, J. Andreu, J.C. Delgado

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 313 KB

english, 1993

31

Preparation and microstructure of reactively sputtered Ti1−xZrxN films

I. Sakamoto, S. Maruno, P. Jin

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.34 MB

english, 1993

32

Growth and structure of YBa2Cu3O7−δ thin films studied by scanning tunnelling microscopy and electron microscopy

H. Haefke, H.P. Lang, R. Sum, H.-J. Güntherodt, L. Berthold, D. Hesse

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 6.15 MB

english, 1993

33

In-situ growth of epitaxial YBa2Cu3O7 thin films by on-axis unbalanced d.c. magnetron sputtering

N. Savvides, A. Katsaros

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 321 KB

english, 1993

34

Superconducting thin film thermometers for calorimetric particle detectors

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 271 KB

english, 1993

35

Initial growth mechanism of BiSrCaCuO thin films on SrTiO3(110) surfaces studied by in-situ reflection high energy electron diffraction observation

Tadao Miura, Yoshiki Ishizuka

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 612 KB

english, 1993

36

Effects of carbon impurities in high Tc superconducting tapes using Auger electron spectroscopy

E.W. Seibt, A. Jeremie, R. Flükiger

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.42 MB

english, 1993

37

Intrinsic pinning of vortices in superconducting Nb/Cu multilayers grown by molecular beam epitaxy

S.H. Brongersma, E. Verweij, N.J. Koeman, D.G. de Groot, R. Griessen, B.I. Ivlev

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 324 KB

english, 1993

38

Shape memory thin film of TiNi formed by sputtering

A. Ishida, A. Takei, S. Miyazaki

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.21 MB

english, 1993

39

Effect on lacquer adhesion of solid state properties of tin oxides

G.M. Ingo, G. Scavia, L. Giorgi

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 321 KB

english, 1993

40

Preparation and structure of CuW thin films

Nikola Radić, Biserka Gržeta, Davor Gracin, Tihomir Car

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 256 KB

english, 1993

41

Texture and residual macrostress of TiN coatings

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 207 KB

english, 1993

42

Structural analysis of ZrN and TiN films prepared by reactive plasma beam deposition

P. Panjan, B. Navinšek, A. Žabkar, V. Marinković, Dj. Mandrino, J. Fišer

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 781 KB

english, 1993

43

Structure and properties of (Ti1−xAlx)N films prepared by reactive sputtering

Yusuke Tanaka, Turgut M. Gür, Michael Kelly, Stig B. Hagstrom, Tsutomu Ikeda

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 2.34 MB

english, 1993

44

Stress and anisotropy effects in the interfacial reactions of Al and TiNx

F. Edelman, R. Brener, M. Eizenberg, E. Sader, Y. Dafne

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 375 KB

english, 1993

45

Ion beam modification of the physical properties of MoSx films

S.P. Kaye, H. Kheyrandish, J.S. Colligon, E.W. Roberts

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 373 KB

english, 1993

46

MoS2−x lubricating films: structure and wear mechanisms investigated by cross-sectional transmission electron microscopy

J. Moser, F. Lèvy

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.87 MB

english, 1993

47

Effect of plasma nitriding on the properties of (Ti, Al)N coatings deposited onto hot work steel substrates

T. Gredić, M. Zlatanović, N. Popović, Ž. Bogdanov

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 4.30 MB

english, 1993

48

High dose implantation of nitrogen in tool steel: Auger electron spectroscopy and hardness measurements

L.J. Bredell, J.B. Malherbe

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 392 KB

english, 1993

49

Reactivity between Ti and N2C2H2 mixed gas on Ti(C, N) film deposition by arc-like plasma-enhanced ion plating

H. Kajioka, K. Higuchi, Y. Kawashimo

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 501 KB

english, 1993

50

Electron spin resonance study of diamond-like nuclei produced in an Si surface layer by high dose C ion doping

T. Izumi, Y. Show, M. Deguchi, M. Kitabatake, T. Hirao, Y. Mori, T. Ito, A. Hiraki

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 317 KB

english, 1993

51

X-ray study of silicon distortion on deposition of diamond-like films

Victor Chaplanov, Igor Galkin, Aleksey Nefedov, Ilja Shipov, Sergey Yakimov, Svetlana Gerasimovich, Vera Elinson, Vladimir Sleptsov

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 289 KB

english, 1993

52

Morphology of thin polyimide films

G. Danev, E. Spassova, K. Popova

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 4.63 MB

english, 1993

53

Study of ultrafine particles-organic polymer thin films

Z.Q. Xue, W.M. Liu, Y.W. Liu, H.J. Gao, X.Y. Zhao, Q.D. Wu, S.J. Pang, C. Zhu, Z. Ma, J. Shen

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 2.01 MB

english, 1993

54

Low temperature plasma treatment of monomolecular Langmuir-Blodgett films

A.A. Kalachev, K. Mathauer, U. Höhne, H. Möhwald, G. Wegber

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.67 MB

english, 1993

55

Area-selective CVD of metals

Kazuo Tsubouchi, Kazuya Masu

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 4.00 MB

english, 1993

56

Atomic-scale simulation of interface defect formation in the initial stages of thin film growth

M. Djafari Rouhani, A.M. Gué, M. Sahlaoui, D. Estève

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 295 KB

english, 1993

57

Subject index of volume 228

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 482 KB

english, 1993

58

Thin films in the integrated circuit industry: requirements and deposition methods

E.H.A. Granneman

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 7.02 MB

english, 1993

59

Study of growth kinetics in silicon gas source molecular beam epitaxy with disilane using RHEED intensity oscillations

S. Butzke, K. Werner, J. Trommel, S. Radelaar, P. Balk

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 431 KB

english, 1993

60

Vibrations at AgAu interfaces

E.V. Chulkov, I.Yu. Sklyadneva, G.G. Rusina

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 200 KB

english, 1993

61

The influence of various process gases on the magnetron sputtering of ZrB12

P. Losbichler, C. Mitterer, W.S.M. Werner, H. Störi, J. Barounig

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.14 MB

english, 1993

62

High resolution Rutherford backscattering spectroscopy studies on Mo/Si multilayers

B. Heidemann, T. Tappe, B. Schmiedeskamp, U. Heinzmann

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 356 KB

english, 1993

63

High bias sputtering for large-area selective deposition

C. Nender, I.V. Katardjiev, A.M. Barklund, S. Berg, P. Carlsson

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.00 MB

english, 1993

64

Emission line intensities in an r.f. sputtering glow discharge system

J.L. Hernández-Rojas, M.L. Lucía, J. Santamaría, G. Gonzáles-Díaz, I. Mártil, F. Sánchez-Quesada

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 321 KB

english, 1993

65

H in Ti thin films

Th. Krist, M. Brière, L. Cser

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 266 KB

english, 1993

66

A study of thermally activated interfacial reactions in an Ni/Cr/Si multilayer structure

F. Pimentel, A. Zalar, S. Hofmann, D. Kohl, P. Panjan

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.21 MB

english, 1993

67

Smoothing of interfaces in ultrathin Mo/Si multilayers by ion bombardment

A. Kloidt, H.J. Stock, U. Kleineberg, T. Döhring, M. Pröpper, B. Schmiedeskamp, U. Heinzmann

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 354 KB

english, 1993

68

High resolution electron microscopy on superconducting YBa2Cu3O7 thin films

C. Træholt, J.G. Wen, V. Svetchnikov, A. Delsing, H.W. Zandbergen

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 2.65 MB

english, 1993

69

Laser deposition of YBaCuO on ZrO2-coated sapphire substrates

A.J. Basovich, S.V. Gaponov, L. Jastrabík, M. Jelínek, N.A. Kiselev, E.B. Kluenkov, O.I. Lebedev, L.A. Mazo, L. Soukup, M.D. Strikovskij, V.V. Talanov, A.L. Vasiliev

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 412 KB

english, 1993

70

The effect of surface aluminum oxide films on thermally induced hillock formation

C.Y. Chang, R.W. Vook

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 4.54 MB

english, 1993

71

Properties of reactively d.c.-magnetron-sputtered A1N thin films

E. Rille, R. Zarwasch, H.K. Pulker

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 279 KB

english, 1993

72

Laser-damage threshold of Sc2O3/SiO2 high reflector coatings for a laser wavelength of 355 nm

S. Tamura, S. Kimura, Y. Sato, H. Yoshida, K. Yoshida

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 219 KB

english, 1993

73

Transformation of titanium nitride in oxygen plasma

C. Jiménez, J. Perrière, C. Palacio, J.P. Enard, J.M. Albella

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 360 KB

english, 1993

74

Deposition of wear-resistant BN coatings by r.f. plasma-assisted chemical vapour deposition

J. Smeets, V. Van Den Bergh, J. Meneve, E. Dekempeneer, L. De Wilde

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 294 KB

english, 1993

75

X-ray photoelectron spectroscopy and secondary-ion mass spectrometry of boron nitride thin films on austenitic stainless steel

G.M. Ingo, G. Padeletti

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 1.40 MB

english, 1993

76

Hardness and elastic modulus of diamond and diamond-like carbon films

N. Savvides, T.J. Bell

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 310 KB

english, 1993

77

Calculations for defects formed on diamond surfaces

Timur Halicioglu

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 290 KB

english, 1993

78

Modelling and computer simulation of ion-beam- and plasma-assisted film growth

Wolfhard Möller

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 676 KB

english, 1993

79

Computer simulation of growth of thin films fabricated by the sputtering method: comparison with experiment

K. Nanbu, S. Uchida, H. Yoshida

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 211 KB

english, 1993

80

Author index of volume 228

Journal:

Thin Solid Films

Year:

1993

File:

PDF, 91 KB

1993

81

In situ observation of the growth process of the InAsGaAs heteroepitaxial system using scanning microprobe reflection high energy electron diffraction-total reflection angle X-ray spectroscopy

S. Shimizu, K. Yamamuro, K. Fuwa, H. Yanagida, H. Yamakawa, S. Ino

Journal:

Thin Solid Films

Year:

1993

Language:

english

File:

PDF, 2.24 MB

english, 1993