Structures of Au and Ti thin films formed at the interface...

Thin Solid Films 1993 Vol. 228; Iss. 1-2

Structures of Au and Ti thin films formed at the interface with Si by the plasma process

Kunihiro Kashiwagi, Hideki Sekiguchi, Yoichi Murayama
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Volume:
228
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90574-9
File:
PDF, 351 KB
english, 1993
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