Chemical vapour deposition tungsten film growth studied by...

Chemical vapour deposition tungsten film growth studied by in situ growth stress measurements

G.J. Leusink, T.G.M. Oosterlaken, G.C.A.M. Janssen, S. Redelaar
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
228
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90579-e
File:
PDF, 349 KB
english, 1993
Conversion to is in progress
Conversion to is failed