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Growth of low and high refractive index dielectric layers as studied by in situ ellipsometry
V. Nguyen Van, S. Fisson, J.M. Frigerio, J. Rivory, G. Vuye, Y. Wang, F. AbelèsVolume:
253
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90331-x
File:
PDF, 460 KB
english, 1994