Volume 253; Issue 1-2

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Thin Solid Films
Volume 253; Issue 1-2

Thin Solid Films

Volume 253; Issue 1-2

1

Editorial Board

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 42 KB

english, 1994

2

Publication schedule

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 49 KB

english, 1994

3

Annealing and Sb-doping of SnO films produced by filtered vacuum arc deposition: structure and electro-optical properties

L. Kaplan, A. Ben-Shalom, R.L. Boxman, S. Goldsmith, U. Rosenberg, M. Nathan

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 830 KB

english, 1994

4

Preparation of milky transparent conducting ZnO films with textured surface by atmospheric chemical vapour deposition using Zn (C5H7O2)2

T. Minami, H. Sato, H. Sonohara, S. Takata, T. Miyata, I. Fukuda

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 475 KB

english, 1994

5

Optical quantum size effects in diamond-like carbon superlattice structures

S.R.P. Silva, G.A.J. Amaratunga, Rusli, S. Haq, E.K. Salje

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 464 KB

english, 1994

6

Optical analysis of complex multilayer structures using multiple data types

Blaine D. Johs, William A. McGahan, John A. Woollam

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 241 KB

english, 1994

7

Laser-assisted deposition of optical coatings

P. Thomsen-Schmidt, D. Schäfer, B. Steiger, H. Brauße, H. Johansen, T. Martini

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 484 KB

english, 1994

8

Decorative optical coatings

Georg Reiners, Uwe Beck, Hermann A. Jehn

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 746 KB

english, 1994

9

Spatially resolved densification of solution deposited zirconium dioxide films by laser irradiation

Gregory J. Exarhos, Li Qiong Wang, Tasshi Dennis

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 561 KB

english, 1994

10

Effects of ion beam irradiation on the properties and epitaxial growth of aluminium nitride film by the ion beam assisted deposition process

Ig-Hyeon Kim, Seon-Hyo Kim

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 453 KB

english, 1994

11

BaxSr1−xTiO3 thin films by a chemical process

Z.A. Burhanuddin, M.S. Tomar, E. Dayalan

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 278 KB

english, 1994

12

Modified Forouhi and Bloomer dispersion model for the optical constants of amorphous hydrogenated carbon thin films

William A. McGahan, Tim Makovicka, Jeffrey Hale, John A. Woollam

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 386 KB

english, 1994

13

Characterization of pCuGa0.25In0.75Se2nZn0.35Cd0.65S polycrystalline thin film heterojunctions

Y. Aparna, B.Srinivasulu Naidu, P.Jayarama Reddy

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 365 KB

english, 1994

14

Synthesis and structural characterization of boron nitride thin films

M. Elena, L. Guzman, L. Calliari, L. Moro, A. Steiner, A. Miotello, M. Bonelli, R. Capelletti, P.M. Ossi

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 577 KB

english, 1994

15

Physical properties of nitrogenated amorphous carbon films produced by ion-beam-assisted deposition

François Rossi, Bernard Andre, A. van Veen, P.E. Mijnarends, H. Schut, F. Labohm, Marie Paule Delplancke, Hugh Dunlop, Eric Anger

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 438 KB

english, 1994

16

Diamond coatings from a solid carbon source

Shyankay Jou, Hans J. Doerr, Rointan F. Bunshah

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 957 KB

english, 1994

17

Optimizing the gas phase chemistry in a d.c. arcjet diamond chemical vapor deposition reactor

Scott W. Reeve, Wayne A. Weimer

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 538 KB

english, 1994

18

Deposition of white diamond thin films by increasing the total pressure in a microwave-plasma-enhanced chemical vapour deposition system

S.H. Kim, Y.S. Park, J.-W. Lee

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 488 KB

english, 1994

19

Internal stress of chemical vapour deposition diamond film on silicon

Y.H. Chiou, C.T. Hwang, M.Y. Han, J.H. Jou, Y.S. Chang, H.C. Shih

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 517 KB

english, 1994

20

Elastic modulus of diamond-like carbon films prepared by pulsed vacuum arc

B. Schultrich, H.-J. Scheibe, G. Grandremy, D. Schneider, P. Siemroth

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 380 KB

english, 1994

21

Electrical properties of diamond thin films grown by chemical vapor deposition technique

A.K. Kulkarni, A. Shrotriya, P. Cheng, H. Rodrigo, R. Bashyam, D.J. Keeble

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 379 KB

english, 1994

22

Use of space-charge-limited current to evaluate the electronic density of states in diamond-like carbon thin films

S.R.P. Silva, G.A.J. Amaratunga

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 469 KB

english, 1994

23

The effect of impurities on the IR absorption of chemically vapor deposited diamond

K.M. McNamara, B.E. Scruggs, K.K. Gleason

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 472 KB

english, 1994

24

Optical characterization of diamond synthesized using CH4CO2 gas mixtures without supplying hydrogen gas

Chia-Fu Chen, Sheng-Hsiung Chen, Tsao-Ming Hong, Jen-Shiang Leu

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 622 KB

english, 1994

25

Coatings tribology: a concept, critical aspects and future directions

Kenneth Holmberg, Allan Mathews

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 617 KB

english, 1994

26

Electrostatic-based model for alumina surfaces

F.H. Streitz, J.W. Mintmire

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 489 KB

english, 1994

27

Molecular dynamics simulations of friction in self-assembled monolayers

Kenneth J. Tupper, Donald W. Brenner

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 437 KB

english, 1994

28

Atomic-scale friction measurements on silver and chemisorbed oxygen surfaces

C. Mak, C. Daly, J. Krim

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 317 KB

english, 1994

29

Triboscopic description of local wear phenomena under an AFM tip

J.L. Loubet, M. Belin, R. Durand, H. Pascal

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 582 KB

english, 1994

30

Plastic deformation in atomic size contacts

N. Agraït, J.G. Rodrigo, G. Rubio, C. Sirvent, S. Vieira

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 409 KB

english, 1994

31

Mechanical property characterization of thin films using spherical tipped indenters

M.V. Swain, J. Menčík

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 861 KB

english, 1994

32

Effects of activated reactive evaporation process parameters on the microhardness of polycrystalline silicon carbide thin films

YongHwa Chris Cha, Guho Kim, Hans J. Doerr, Rointan F. Bunshah

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 552 KB

english, 1994

33

Enhanced mechanical hardness in compositionally modulated Fe(001)Pt(001) and Fe(001)Cr(001) epitaxial thin films

B.J. Daniels, W.D. Nix, B.M. Clemens

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 444 KB

english, 1994

34

Holographic and spectroscopic characterization of spiropyran doped poly(methyl methacrylate) films

S.S. Xue, G. Manivannan, R.A. Lessard

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 428 KB

english, 1994

35

Characterization of thin film ZnO/ZnCdS/CuGaSe2 heterojunctions

K.T.Ramakrishna Reddy, P.Jayarama Reddy

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 406 KB

english, 1994

36

Atmosphere influence on in-situ ion beam analysis of thin film growth

Yuping Lin, Alan R. Krauss, Robert P.H. Chang, Orlando H. Auciello, Dieter M. Gruen, J.Albert Schultz

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 581 KB

english, 1994

37

Opening and closing of channels during phase transitions in AlMn thin films

J. Reyes-Gasga, R. García

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 338 KB

english, 1994

38

Growth of low and high refractive index dielectric layers as studied by in situ ellipsometry

V. Nguyen Van, S. Fisson, J.M. Frigerio, J. Rivory, G. Vuye, Y. Wang, F. Abelès

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 460 KB

english, 1994

39

Use of valence band Auger electron spectroscopy to study thin film growth: oxide and diamond-like carbon films

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 723 KB

english, 1994

40

Effects of hydrogen annealing, sulfur segregation and diffusion on the cyclic oxidation resistance of superalloys: a review

J.L. Smialek, D.T. Jayne, J.C. Schaeffer, W.H. Murphy

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 632 KB

english, 1994

41

Interfacial reactions in dynamically heated Si/Me/Si sandwich layers

A. Zalar, S. Hofmann, F. Pimentel, P. Panjan

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 493 KB

english, 1994

42

Characterization of TiO2/SiO2 multilayers by high resolution transmission electron microscopy and electron energy loss spectroscopy

K. Yu-Zhang, G. Boisjolly, J. Rivory, L. Kilian, C. Colliex

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 479 KB

english, 1994

43

Modelling of surface roughness in variable-angle spectroscopic ellipsometry, using numerical processing of atomic force microscopy images

F.K. Urban III, P. Ruzakowski Athey, Md.S. Islam

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 587 KB

english, 1994

44

Photoacoustic studies of laser damage in oxide thin films

M. Reichling, J. Siegel, E. Matthias, H. Lauth, E. Hacker

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 469 KB

english, 1994

45

Investigations on n-CdO/p-CdTe thin film heterojunctions

C. Sravani, K.T.R. Reddy, O.Md. Hussain, P.Jayarama Reddy

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 372 KB

english, 1994

46

Microstructure and mechanical properties of sputtered platinum films

H. Tokura, B. Window, D. Neely, M. Swain

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 430 KB

english, 1994

47

Residual stress distribution in electroplated ZnNi alloy layer determined by X-ray diffraction

Toshihiko Sasaki, Yukio Hirose

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 406 KB

english, 1994

48

Pin-pull adhesion measurements of copper films on ion-bombarded alumina

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 469 KB

english, 1994

49

Al planarization processes for multilayer metallization of quarter micrometer devices

Zheng Xu, Hoa Kieu, Ivo J. Raaijmakers, Avi Tepman

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 750 KB

english, 1994

50

Formation of low pressure chemically vapour deposited W thin film on silicon dioxide for gate electrode application

Jae Hyun Sone, Sun-Oo Kim, Ki-Joan Kim, Hyoung Sub Kim, Hyeong Joon Kim

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 422 KB

english, 1994

51

Bombardment and gas rarefaction effects on the properties of sputtered Ti thin films

W. Tsai, M.J. Brett, S.K. Dew, D. Liu, T. Smy, R.N. Tait

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 417 KB

english, 1994

52

Selective electroless copper plating on silicon seeded by copper ion implantation

S. Bhansali, D.K. Sood, R.B. Zmood

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 495 KB

english, 1994

53

Au/(TiW) and Au/Cr metallization of chemically vapor-deposited diamond substrates for multichip module applications

Ilango Meyyappan, A.P. Malshe, H.A. Naseem, W.D. Brown

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 699 KB

english, 1994

54

Properties of silicon nitride films prepared by magnetron sputtering

Y. Hirohata, N. Shimamoto, T. Hino, T. Yamashima, K. Yabe

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 410 KB

english, 1994

55

The effects of substrate and annealing ambient on the electrical properties of Ta2O5 thin films prepared by plasma enhanced chemical vapor deposition

Sun-Oo Kim, Hyeong Joon Kim

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 418 KB

english, 1994

56

Single-phase polycrystalline Ti1−xWxN alloys (0⩽x⩽0.7) grown by UHV reactive magnetron sputtering: microstructure and physical properties

J.H. Moser, F. Tian, O. Haller, D.B. Bergstrom, I. Petrov, J.E. Greene, C. Wiemer

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 549 KB

english, 1994

57

Effect of dimension scaling on the nucleation of C54 TiSi2

Z. Ma, L.H. Allen, D.D.J. Allman

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 554 KB

english, 1994

58

Kinetics of Ni/a-Ge bilayer reactions

J.Ken Patterson, B.J. Park, K. Ritley, H.Z. Xiao, L.H. Allen, A. Rockett

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 472 KB

english, 1994

59

High resistivity Co and Ti silicide formation on silicon-on-insulator substrates

S.L. Hsia, G.E. McGuire, T.Y. Tan, P.L. Smith, W.T. Lynch

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 513 KB

english, 1994

60

Chemical vapor deposition of TiSi2 using SiH4 and TiCl4

M.A. Mendicino, R.P. Southwell, E.G. Seebauer

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 479 KB

english, 1994

61

Thermal stability of silicide on polycrystalline Si

Q.Z. Hong, Stella Q. Hong, F.M. D'Heurle, J.M.E. Harper

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 572 KB

english, 1994

62

Morphology of AlNiGe ohmic contacts to n-GaAs as a function of contact composition

X.W. Lin, W.V. Lampert, W. Swider, T.W. Haas, P.H. Holloway, J. Washburn, Z. Liliental-Weber

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 617 KB

english, 1994

63

Non-alloyed, refractory metal contact optimization with shallow implantations of Zn and Mg

M.L. Lovejoy, J.C. Zolper, M.E. Sherwin, A.G. Baca, R.J. Shul, D.J. Rieger, J.F. Klem

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 506 KB

english, 1994

64

Development of a gate metal etch process for gallium arsenide wafers

Rahul Bammi, Timothy S. Cale, Gordon Grivna

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 598 KB

english, 1994

65

Realistic electromigration lifetime projection of VLSI interconnects

Hisao Kawasaki, Charles Lee, Tat-Kwan Yu

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 568 KB

english, 1994

66

Effect of electro- and stress migration forces on the 1fα noise of patterned thin metal films

James G. Cottle, Nick Klonaris

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 406 KB

english, 1994

67

Properties of boron coatings used as plasma facing material of fusion device

T. Hino, K. Iwamoto, Y. Hirohata, T. Yamashina, A. Sagara, N. Noda, N. Inoue, Y. Kubota, N. Natsir, O. Motojima, T. Matsuda, T. Sogabe, K. Kuroda, M. Yabe

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 350 KB

english, 1994

68

Transport through multicomponent dual frequency plasma sheaths

Frank R. Myers, Michael W. Peters, Manjula Ramaswami, Timothy S. Cale

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 621 KB

english, 1994

69

A.c. properties of ZnO thin films prepared by r.f. magnetron sputtering

F.S. Mahmood, R.D. Gould

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 355 KB

english, 1994

70

Author index of volume 253

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 110 KB

english, 1994

71

Preparation of conductive ZnO:Al films by a facing target system with a strong magnetic field

Kikuo Tominaga, Masahiro Kataoka, Tetsuya Ueda, Munfei Chong, Yoshihiro Shintani, Ichiro Mori

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 412 KB

english, 1994

72

Amorphous Si thin films prepared by vacuum arc deposition

D. Arbilly, R.L. Boxman, S. Goldsmith, A. Rothwarf, L. Kaplan

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 396 KB

english, 1994

73

Cross-sectional transmission electron microscopy observations of c-BN films deposited on Si by ion-beam-assisted deposition

H. Yamashita, K. Kuroda, H. Saka, N. Yamashita, T. Watanabe, T. Wada

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 642 KB

english, 1994

74

Carbon nitride formation by low-energy nitrogen implantation into graphite

I. Gouzman, R. Brener, A. Hoffman

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 436 KB

english, 1994

75

Nucleation studies of thin diamond films on model substrates

Jörg Patscheider, Baybars Oral

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 470 KB

english, 1994

76

Effects of ambient conditions on the adhesion of cubic boron nitride films on silicon substrates

G.F. Cardinale, P.B. Mirkarimi, K.F. McCarty, E.J. Klaus, D.L. Medlin, W.M. Clift, D.G. Howitt

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 675 KB

english, 1994

77

Comparative study of trimethylboron doping of hot filament chemically vapour deposited and microwave plasma chemically vapour deposited diamond films

M.C. Polo, J. Cifre, J. Puigdollers, J. Esteve

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 397 KB

english, 1994

78

Study of the loss of pattern definition in diamond growth

Chia-Fu Chen, Sheng-Hsiung Chen

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 457 KB

english, 1994

79

Microstructure and thermal conductivity of epitaxial AlN thin films

P.K. Kuo, G.W. Auner, Z.L. Wu

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 567 KB

english, 1994

80

Emittance characterization of thermal control paints, coatings and surfaces using a calorimetric technique

Donald A Jaworske

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 397 KB

english, 1994

81

Characterization of laser-ablated boron nitride thin films on silicon

R.W. Pryor, Z.L. Wu, K.R. Padmanabhan, S. Villanueva, R.L. Thomas

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 342 KB

english, 1994

82

Numerical ellipsometry: enhancement of new algorithm for real-time, in situ film growth monitoring

Frank K. Urban III, John Craig Comfort

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 564 KB

english, 1994

83

A new interpretation of the binding energies in X-ray photoelectron studies of oxides

Tery L. Barr, Sudipta Seal, Li Mei Chen, Chi Chang Kao

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 712 KB

english, 1994

84

Surface morphology examination of sol-gel deposited TiO2 films

M. Anast, Å. Jamting, J.M. Bell, B. Ben-Nissan

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 424 KB

english, 1994

85

Aspects of the surface roughness of ceramic bonding tools on a nanometer scale investigated with atomic force microscopy

J. Burger, G. Dietler, M. Binggeli, R. Christoph, O. Marti

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 351 KB

english, 1994

86

Microstructural investigation of the κ-Al2O3 → α-Al2O3 transformation in multilayer coatings of chemically vapour deposited κ-Al2O3

N. Lindulf, M. Halvarsson, H. Nordén, S. Vuorinen

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 856 KB

english, 1994

87

Advanced image processing in scanning probe microscopy

F.K. Urban III, P. Romine, Md.S. Islam

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 746 KB

english, 1994

88

Residual stress in stabilized zirconia thin films prepared by r.f. magnetron sputtering

P. Scardi, P. Polonioli, S. Ferrari

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 535 KB

english, 1994

89

The effects of collimation on intrinsic stress in sputter-deposited metallic thin films

T. Janacek, D. Liu, S.K. Dew, M.J. Brett, T.J. Smy

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 430 KB

english, 1994

90

Cu deposition using a permanent magnet electron cyclotron resonance microwave plasma source

Lee A. Berry, S.M. Gorbatkin, R.L. Rhoades

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 377 KB

english, 1994

91

TiN-capped TiSi2 formation in W/TiSi2 process for a quarter-micron complementary metal-oxide-semiconductor

Y. Matsubara, M. Sekine, N. Kodama, K. Noguchi, K. Okumura

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 676 KB

english, 1994

92

Gold and zinc thin films deposited by the ionized cluster beam technique

S.W. Feng, J.J. Nainaparampil, M.F. Tabet, F.K. Urban III

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 519 KB

english, 1994

93

Electrical properties of the p+-gate electrode of an a-Si/poly-Si double layer

Sun-Oo Kim, Ki-Joon Kim, Hyoung Sub Kim, Sug Bong Kang, Jae Hyun Sone, Jeong Soo Byun, Hyeong Joon Kim

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 577 KB

english, 1994

94

Numerical simulations of thin film thermal flow

Hung Liao, Timothy S. Cale

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 577 KB

english, 1994

95

UV-radiation-induced degradation of fluorinated polyimide films

Li-Hsin Chang, Naresh C. Saha

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 504 KB

english, 1994

96

Comparison of chemical vapor deposition of TiN using tetrakis-diethylamino-titanium and tetrakis-dimethylamino-titanium

S.C. Sun, M.H. Tsai

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 485 KB

english, 1994

97

Thickness dependence of the properties and thermal stability of PtSi films

S.R. Das, K. Sheergar, D.-X. Xu, A. Naem

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 581 KB

english, 1994

98

Electrical and structural properties of buried CoSi2 layers in Si(100) grown by molecular beam allotaxy

M. Dolle, U. Gassig, H.L. Bay, A. Schüppen, S. Mantl

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 419 KB

english, 1994

99

Subject index of volume 253

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 345 KB

english, 1994

100

Fabrication of an electron multiplier utilizing diamond films

G.T. Mearini, I.L. Krainsky, Y.X. Wang, J.A. Dayton Jr., R. Ramesham, M.F. Rose

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 525 KB

english, 1994