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Chemical vapor deposition of TiSi2 using SiH4 and TiCl4
M.A. Mendicino, R.P. Southwell, E.G. SeebauerVolume:
253
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(94)90369-7
File:
PDF, 479 KB
english, 1994