Non-alloyed, refractory metal contact optimization with shallow implantations of Zn and Mg
M.L. Lovejoy, J.C. Zolper, M.E. Sherwin, A.G. Baca, R.J. Shul, D.J. Rieger, J.F. KlemVolume:
253
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(94)90373-5
File:
PDF, 506 KB
english, 1994