Calculation of STM profiles for nanometrology

Calculation of STM profiles for nanometrology

H. Sbosny, L. Koenders, M. Hietschold
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Volume:
264
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(95)05848-6
File:
PDF, 396 KB
english, 1995
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