Characterization of buried cobalt silicide layers in Si by MEVVA implantation
Qicai Peng, S.P. Wong, I.H. Wilson, N. Wang, K.K. FungVolume:
270
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)06830-9
File:
PDF, 698 KB
english, 1995