Volume 270; Issue 1-2

Thin Solid Films

Volume 270; Issue 1-2
3

Comparative analysis of razor blade coatings using Auger electron spectroscopy

R.L. Moore
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 442 KB
english, 1995
5

Surface analysis algorithms for scanning probe microscopy

Claude S. Lindquist, F.K. Urban III
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 727 KB
english, 1995
7

Simulation of collimated flux distributions during physical vapor deposition

Zhou Lin, Timothy S. Cale
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 569 KB
english, 1995
10

Artifacts in SPM measurements of thin films and coatings

T.G. Lenihan, A.P. Malshe, W.D. Brown, L.W. Schaper
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 730 KB
english, 1995
11

UHV RHEED system for in-situ studies of sputtered films

S.R. Das, L. LeBrun, P.B. Sewell, T. Tyrie
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 622 KB
english, 1995
16

Characterization of buried cobalt silicide layers in Si by MEVVA implantation

Qicai Peng, S.P. Wong, I.H. Wilson, N. Wang, K.K. Fung
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 698 KB
english, 1995
18

The chemical vapor deposition of copper and copper alloys

Pascal Doppelt, Thomas H. Baum
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 337 KB
english, 1995
19

0.10 μm TiSi2 technology utilizing nitrogen diffusion controlled RTA

Y. Matsubara, T. Sakai, T. Ishigami, K. Ando, T. Horiuchi
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 904 KB
english, 1995
20

Influence of thickness and substrate on the hardness and deformation of TiN films

M. Wittling, A. Bendavid, P.J. Martin, M.V. Swain
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 598 KB
english, 1995
21

Dielectric reference coatings for the evaluation of thin film characterization techniques

U. Beck, G. Reiners
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 712 KB
english, 1995
22

Silicide formation and stability of TiSiGe and CoSiGe

Zhihai Wang, D.B. Aldrich, Y.L. Chen, D.E. Sayers, R.J. Nemanich
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 785 KB
english, 1995
24

Morphology and stability of (Ti0.9Zr0.1) Si2 thin films on Si(111) and Si(100) formed in UHV

Y. Dao, D.E. Sayers, R.J. Nemanich
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 678 KB
english, 1995
33

Influence of processing variables on the structure and properties of ZnO films

Gregory J. Exarhos, Shiv K. Sharma
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 701 KB
english, 1995
34

High-temperature Raman study in CVD diamond

Kuei-Hsien Chen, Yen-Liang Lai, Li-Chyong Chen, Jin-Yu Wu, Fu-Jen Kao
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 596 KB
english, 1995
37

CoSi2 and TiSi2 for SiSiGe heterodevices

M. Glück, A. Schüppen, M. Rösler, W. Heinrich, J. Hersener, U. König, O. Yam, C. Cytermann, M. Eizenberg
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 706 KB
english, 1995
39

In-situ ellipsometry on sputtered dielectric and magneto-optic thin films

Scott Heckens, John A. Woollam
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 381 KB
english, 1995
41

Electrical properties of diamond films grown at low temperature

Chia-Fu Chen, Sheng-Hsiung Chen, Kuen-Mo Lin
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 611 KB
english, 1995
42

Patterning of multilayer dielectric optical coatings for multispectral CCDs

J.D. Barrie, K.A. Aitchison, G.S. Rossano, M.H. Abraham
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 621 KB
english, 1995
46

Zinc oxide thin films by the spray pyrolysis method

Malle Krunks, Enn Mellikov
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 439 KB
english, 1995
47

CVD of fluorosilicate glass for ULSI applications

M.J. Shapiro, S.V. Nguyen, T. Matsuda, D. Dobuzinsky
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 596 KB
english, 1995
52

Characterization of ion-beam-deposited diamond-like carbon films

V. Palshin, E.I. Meletis, S. Ves, S. Logothetidis
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 878 KB
english, 1995
53

Characterization of diamond films deposited on titanium and its alloys

D. Rats, L. Vandenbulcke, R. Herbin, R. Benoit, R. Erre, V. Serin, J. Sevely
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 730 KB
english, 1995
54

Doping of rf plasma deposited diamond-like carbon films

S.R.P. Silva, G.A.J. Amaratunga
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 656 KB
english, 1995
55

Photoelectron spectroscopy of ion-irradiated B-doped CVD diamond surfaces

G. Francz, P. Reinke, P. Oelhafen, W. Hänni
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 544 KB
english, 1995
60

D.c. properties of ZnO thin films prepared by r.f. magnetron sputtering

F.S. Mahmood, R.D. Gould, A.K. Hassan, H.M. Salih
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 468 KB
english, 1995
62

Space-charge-limited conductivity in evaporated cadmium selenide thin films

A.O. Oduor, R.D. Gould
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 440 KB
english, 1995
64

Surface modification of aluminum alloys in molten salts containing CeCl3

F. Mansfeld, F.J. Pérez
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 496 KB
english, 1995
67

Epitaxial growth of gallium nitride by ion-beam-assisted evaporation

Chan-Wook Jeon, Seon-Hyo Kim, Ig-Hyeon Kim
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 607 KB
english, 1995
68

Growth of dielectric layers on the InSb surface

Anjali Rastogi, K.V. Reddy
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 421 KB
english, 1995
69

Editorial Board

Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 60 KB
english, 1995
70

Publication schedule

Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 87 KB
english, 1995
71

Committee

Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 101 KB
english, 1995
72

Exhibitor

Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 65 KB
english, 1995
73

Subject index of volume 270

Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 874 KB
english, 1995
74

Preface

Hermann A. Jehn, Allan Matthews, Gary E. McGuire, Ivan Petrov
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 76 KB
english, 1995
76

Preparation and characterization of oxidized silver thin films

L.A.A. Pettersson, P.G. Snyder
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 520 KB
english, 1995
78

Thermal cyclic response of EB PVD yttria-stabilized zirconiaCoCrAlY coatings

A.I. Rybnikov, L.B. Getsov, I.S. Malashenko
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 631 KB
english, 1995
81

A detailed model for low-pressure CVD of tungsten

K.J. Kuijlaars, C.R. Kleijn, H.E.A. van Den Akker
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 610 KB
english, 1995
84

Manufacturability of the CMP process

Farid Malik, Masood Hasan
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 472 KB
english, 1995
87

Deposition of diamond-like carbon on a titanium biomedical alloy

N.J. Ianno, R.O. Dillon, Abbas Ali, A. Ahmad
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 444 KB
english, 1995
88

Segregation of Cu in Cu (Ti) alloys during nitridation in NH3

Daniel Adams, T.L. Alford, N.D. Theodore, S.W. Russell
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 496 KB
english, 1995
89

Characterization of the surface of bio-ceramic thin films

A.M. Ektessabi, H. Kimura
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 604 KB
english, 1995
93

Fracture mechanisms of ceramic coating during wear

D.F. Diao, Y. Sawaki
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 586 KB
english, 1995
95

Quasicrystal films: numerical optimization as a solar selective absorber

T. Eisenhammer
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 579 KB
english, 1995
97

Numerical techniques useful in the practice of ellipsometry

J.C. Comfort, F.K. Urban III
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 730 KB
english, 1995
102

Electrical characterization of CVD diamond thin films grown on silicon substrates

A.K. Kulkarni, K. Tey, H. Rodrigo
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 677 KB
english, 1995
103

GaGeTe films as phase-change optical recording media

Y. Sripathi, L.K. Malhotra, G.B. Reddy
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 493 KB
english, 1995
106

Photon frequency dependent electron relaxation time in noble metals: effect of voids

T. Eisenhammer
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 557 KB
english, 1995
107

Adhesion of diamond coatings on cemented carbides

M. Nesládek, K. Vandierendonck, C. Quaeyhaegens, M. Kerkhofs, L.M. Stals
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 658 KB
english, 1995
110

A continuous electrical resistivity measurement in thin films

A. Cvelbar, P. Panjan, B. Navinšek, A. Zalar, M. Budnar, L. Trontelj
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 439 KB
english, 1995
112

Compatibility of NiSi in the self-aligned suicide process for deep submicrometer devices

R. Mukai, S. Ozawa, H. Yagi
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 669 KB
english, 1995
114

Mechanical measurement of the residual stress in thin PVD films

R.O.E. Vijgen, J.H. Dautzenberg
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 611 KB
english, 1995
119

Author index of volume 270

Journal:
Thin Solid Films
Year:
1995
File:
PDF, 174 KB
1995
120

Creep studies of the EB PVD coatings with a ceramic layer

A.A. Tchizhik, L.B. Getsov, A.I. Rybnikov, I.S. Malashenko
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 447 KB
english, 1995
121

Improving electromigration reliability in Al-alloy lines

G. Rajagopalan, M.L. Dreyer, N.D. Theodore, T.S. Cale
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 681 KB
english, 1995
122

Growth mechanism of Si nodules on BPSG

C. Noritake, I. Kondo, K. Kondo, O. Takenaka, A. Kinbara
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 871 KB
english, 1995
123

Selective tungsten CVD on submicron contact hole

Wen-Kuan Yeh, Mao-Chieh Chen, Pei-Jan Wang, Lu-Min Liu, Mou-Shiung Lin
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 597 KB
english, 1995
124

Non-destructive determination of step coverage on semiconductor wafers

W.H. Johnson, B. Brennan
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 514 KB
english, 1995
125

A thickness model for the TiSi2TiN stack in the titanium salicide process module

Jiunn-Yann Tsai, Pushkar Apte
Journal:
Thin Solid Films
Year:
1995
Language:
english
File:
PDF, 692 KB
english, 1995