Ion-beam-induced insulator deposition for chip circuit modification
Loren Hahn, Marsha Abramo, Leon Moszkowicz, Andrew Doyle, Diane StewartVolume:
270
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0040-6090(95)06844-9
File:
PDF, 387 KB
english, 1995