Recent developments in ionized cluster beam thin film deposition
A.J. Cox, J.J. Nainaparampil, M.F. Tabet, A. Hosseini-Tehrani, F.K. Urban IIIVolume:
270
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06845-7
File:
PDF, 659 KB
english, 1995