Applications of variable angle spectroscopic ellipsometry to strained SiGe alloy heterostructures
A.R. Heyd, S.A. Alterovitz, E.T. Croke, K.L. Wang, C.H. LeeVolume:
270
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06848-1
File:
PDF, 587 KB
english, 1995