Investigation of the nucleation mechanism in bias-enhanced...

Investigation of the nucleation mechanism in bias-enhanced diamond deposition on silicon and molybdenum

P. Reinke, P. Kania, P. Oelhafen
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Volume:
270
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06850-3
File:
PDF, 672 KB
english, 1995
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