CoSi2 and TiSi2 for SiSiGe heterodevices

CoSi2 and TiSi2 for SiSiGe heterodevices

M. Glück, A. Schüppen, M. Rösler, W. Heinrich, J. Hersener, U. König, O. Yam, C. Cytermann, M. Eizenberg
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Volume:
270
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06879-1
File:
PDF, 706 KB
english, 1995
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