Stress reduction for hard amorphous hydrogenated carbon thin films deposited by the self-bias method
Hideo Yamada, Osamu Tsuji, Peter WoodVolume:
270
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(95)06892-9
File:
PDF, 593 KB
english, 1995