CVD of fluorosilicate glass for ULSI applications
M.J. Shapiro, S.V. Nguyen, T. Matsuda, D. DobuzinskyVolume:
270
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0040-6090(95)06896-1
File:
PDF, 596 KB
english, 1995