Highly homogeneous silica coatings for optical and protective applications deposited by PECVD at room temperature in a planar uniform distributed electron cyclotron resonance plasma reactor.
J.C. Rostaing, F. Coeuret, J. Pelletier, T. Lagarde, R. EtemadiVolume:
270
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(96)80068-x
File:
PDF, 660 KB
english, 1995