A detailed model for low-pressure CVD of tungsten
K.J. Kuijlaars, C.R. Kleijn, H.E.A. van Den AkkerVolume:
270
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/0040-6090(96)80077-0
File:
PDF, 610 KB
english, 1995