Polystyrene as a brush layer for directed self-assembly of block co-polymers
Oria, L., Ruiz de Luzuriaga, A., Alduncin, J.A., Perez-Murano, F.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.12.006
Date:
October, 2013
File:
PDF, 3.26 MB
english, 2013