Micromachining of microfluidic channels in glass by microjoule femtosecond laser pulses
Chang, Tien-LiVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.142
Date:
October, 2013
File:
PDF, 2.19 MB
english, 2013