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Effects of chemical components on the bending properties of micro-sized cantilevers in three types of SU-8
Matsuzaki, Junpei, Ishiyama, Chiemi, Sone, Masato, Higo, YakichiVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.050
Date:
October, 2013
File:
PDF, 622 KB
english, 2013