FIB milling of single-crystal and sputtered ZnO: SEM and AFM characterization
Notargiacomo, A., Maiolo, L.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.04.016
Date:
October, 2013
File:
PDF, 1.40 MB
english, 2013