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Voltage and current stress induced variations in TiN/HfSixOy/TiN MIM capacitors
Misra, D., Kasinath, Jyothi, Chandorkar, Arun N.Volume:
53
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2012.08.020
Date:
February, 2013
File:
PDF, 782 KB
english, 2013