Measurement and analysis of thermal stresses in 3D...

Measurement and analysis of thermal stresses in 3D integrated structures containing through-silicon-vias

Jiang, Tengfei, Ryu, Suk-Kyu, Zhao, Qiu, Im, Jay, Huang, Rui, Ho, Paul S.
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Volume:
53
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2012.05.008
Date:
January, 2013
File:
PDF, 1.88 MB
english, 2013
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