Investigations on the removal mechanisms of diverse alumina based polishing slurries for chemical mechanical polishing of electro-plated NiFe 45/55
Rittinger, J., Cvetkovic, S., Rissing, L.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.041
Date:
October, 2013
File:
PDF, 680 KB
english, 2013