Micro-fabrication of air-bearing grooves onto inner surfaces of fine copper pipes
Horiuchi, Toshiyuki, Suzuki, YuyaVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.020
Date:
October, 2013
File:
PDF, 2.52 MB
english, 2013