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Structural peculiarities in high-dose Ar+ implanted silicon
S. Simov, M. Kalitzova, P. Danesh, N. Pashov, P. Bonhomme, G. Balossier, A. DjakovVolume:
35
Year:
1985
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(85)90309-4
File:
PDF, 1.64 MB
english, 1985